JPH0560266B2 - - Google Patents

Info

Publication number
JPH0560266B2
JPH0560266B2 JP59010065A JP1006584A JPH0560266B2 JP H0560266 B2 JPH0560266 B2 JP H0560266B2 JP 59010065 A JP59010065 A JP 59010065A JP 1006584 A JP1006584 A JP 1006584A JP H0560266 B2 JPH0560266 B2 JP H0560266B2
Authority
JP
Japan
Prior art keywords
semiconductor
type
film
region
conductivity type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59010065A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60154671A (ja
Inventor
Kazuo Nakazato
Tooru Nakamura
Masataka Kato
Takao Myazaki
Takahiro Okabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59010065A priority Critical patent/JPS60154671A/ja
Publication of JPS60154671A publication Critical patent/JPS60154671A/ja
Publication of JPH0560266B2 publication Critical patent/JPH0560266B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/63—Vertical IGFETs

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP59010065A 1984-01-25 1984-01-25 半導体装置 Granted JPS60154671A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59010065A JPS60154671A (ja) 1984-01-25 1984-01-25 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59010065A JPS60154671A (ja) 1984-01-25 1984-01-25 半導体装置

Publications (2)

Publication Number Publication Date
JPS60154671A JPS60154671A (ja) 1985-08-14
JPH0560266B2 true JPH0560266B2 (en]) 1993-09-01

Family

ID=11739975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59010065A Granted JPS60154671A (ja) 1984-01-25 1984-01-25 半導体装置

Country Status (1)

Country Link
JP (1) JPS60154671A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5451798A (en) * 1993-03-18 1995-09-19 Canon Kabushiki Kaisha Semiconductor device and its fabrication method
US11227925B2 (en) 2017-04-14 2022-01-18 Ptek Technology Co., Ltd. Semiconductor device and charging system using the same

Also Published As

Publication number Publication date
JPS60154671A (ja) 1985-08-14

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